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In integrated circuit manufacturing, which consequence arises from imperfect molecular hydrogen passivation?

A)Decreased transistor switching speeds
B)Enhanced electron mobility
C)Reduced gate oxide tunneling
D)Lower channel resistance

💡 Explanation

Imperfect passivation results in dangling bonds, and Fermi level pinning due to unpassivated silicon atoms. This interface trap charge depletes the silicon surface of carriers, because the inversion layer formation is suppressed, thus decreasing transistor speeds rather than other electrical effects.

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