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← ScienceWhich image distortion arises when reflective layers induce constructive interference in lithography?
A)Standing wave induced notching✓
B)Proximity effect blur
C)Astigmatism dominates resolution
D)Field curvature increases aberration
💡 Explanation
Standing waves form when light reflects constructively interfering, causing uneven exposure called notching, because intensity varies periodically. Therefore, standing wave induced photoresist notching occurs, rather than proximity effects, astigmatism, or field curvature which relates less to interference intensity.
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