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Which mechanism causes increased gate leakage current in nanoscale MOSFETs with thinner gate oxides?

A)Quantum tunneling of electrons
B)Increased surface phonon scattering
C)Enhanced electron-hole recombination
D)Suppressed avalanche breakdown effects

💡 Explanation

Direct tunneling occurs because the thinner gate oxide allows electrons to tunnel through the insulating layer rather than being blocked by the potential barrier. Therefore, gate leakage increases; rather than options B, C, or D influencing gate integrity.

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