Which mechanism limits the shrinking of channel length in nanoscale MOSFET transistors?

💡 Explanation

As channel length shrinks, the gate oxide thickness also decreases; electrons tunnel through the gate oxide because of the wave nature of these particles and shorter distances, leading to current leakage and device malfunction. Therefore tunneling is the limit, rather than electromigration, capacitance, or scattering which are limited by other physical parameters.

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