Which outcome causes the limited resolution in optical lithography?

💡 Explanation

When light passes through the mask aperture, diffraction causes wavefront divergence hindering imaging of features smaller than the Rayleigh criterion; therefore resolution is limited by this diffraction, rather than by pattern errors, because aberrations affect contrast.

• Which consequence results when coherence is insufficient for digital holography?
• Which phenomenon limits jet engine efficiency at higher compression ratios?
• Which outcome results when a diesel engine's fuel injectors fail causing incomplete combustion?
• Which risk increases when high intensity electromagnetic radiation strikes silicon, exceeding Shockley–Queisser efficiency limit?
• Which outcome occurs when eddy currents cannot circulate freely within a transformer core?
• Which mechanism explains high tensile strength polymers achieve?