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Which outcome commonly occurs within semiconductor fabrication when high doping surpasses solid solubility?

A)Segregation coefficient shifts significantly
B)Quantum confinement reduces mobility
C)Kirkendall voids start to coalesce
D)Amorphous regions cause local curvature

💡 Explanation

Amorphous regions occur because exceeding the solid solubility limit introduces high lattice strain. Atomic rearrangement via amorphization accommodates this strain, therefore creating curved regions locally, rather than uniform strain distribution or void formation at interfaces.

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