Which outcome occurs when a photoresist used in semiconductor lithography absorbs ultraviolet photons?

💡 Explanation

When photoresist absorbs UV photons, photochemical crosslinking occurs because the energy of the photons breaks specific molecular bonds, creating free radicals that initiate polymerization between adjacent polymer chains, solidifying the exposed regions. Therefore, crosslinking occurs, rather than changes conductivity, sublimation, or nanoparticles, which need alternate processes or materials.

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