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← ScienceWhich outcome occurs when a silicon etchant contacts silicon nitride?
A)Selective surface passivation occurs✓
B)Silicon bonds selectively oxidize
C)Uniform etching is always achieved
D)Etch rate remains unaffected
💡 Explanation
Selective passivation occurs because silicon nitride masking prevents attack of silicon underneath and stops etching via the masking effect from modified covalent bonds; therefore, masking layers remain on silicon, rather than silicon undergoing non-selective dissolution, which occurs in absence of the mask.
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