Which outcome occurs when excess electrons disrupt covalent bonds in polysilicon during etching?

💡 Explanation

When excess electrons disrupt covalent bonds, electron-stimulated desorption occurs because the added negative charge weakens specific bonds, promoting atom removal and anisotropic etching. Therefore anisotropic etching results when covalent bonds weaken, rather than etch reduction, passivation, or delamination which derive from other interactions

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