Which outcome results from exceeding silane's pyrolysis temperature during semiconductor manufacturing?

💡 Explanation

Exceeding silane's pyrolysis temperature initiates homogeneous nucleation, precipitating silicon atoms randomly. This rapid deposition of silicon clusters on the substrate results in an uncontrolled amorphous solid, rather than crystalline structures, because the Silicon-Hydrogen bond breaks rapidly during this temperature rise; therefore amorphous silicon is deposited rather than epitaxial growth.

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