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← ScienceWhich phenomenon disrupts microchip lithography when illumination source phase varies?
A)Speckle Formation✓
B)Resonance Fluctuation
C)Temporal Drifting
D)Quantum Entanglement
💡 Explanation
Speckle formation disrupts lithography because it's caused by self-interference of coherent light with varying phase; therefore it changes the intensity pattern rather than just temporal drifting, because the effects are spatially distributed.
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