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← ScienceWhich process limits transistor scaling due to gate oxide insulators?
A)Quantum mechanical electron tunneling✓
B)Increased thermal carrier injection
C)Reduced electron collisional ionization
D)Enhanced Schottky barrier formation
💡 Explanation
Reduced gate oxide thickness leads to electron tunneling directly through the insulator; the tunneling current increases because the electrons utilize quantum tunneling to cross the thin insulator barrier, rather than thermionic emission which requires more energy.
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