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← ScienceWhich risk escalates significantly regarding silicon dioxide dielectrics when electron tunneling increases?
A)Capacitance density reaches saturation limits
B)Gate stack integrity then degrades rapidly✓
C)Substrate doping concentration becomes unstable
D)Transistor threshold voltage becomes erratic
💡 Explanation
Hot-carrier injection damage increases because electron tunneling generates electron-hole pairs, thereby causing increased interface trapped charge via bond breakage involving silicon dangling bonds (kink effect). Therefore, gate stack integrity degrades rather than other electrical issues because the insulating property is physically compromised.
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