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Which outcome occurs from increased substrate temperature during vacuum deposition?

A)Increased adatom surface diffusion
B)Decreased thin film density
C)Elevated residual gas incorporation
D)Reduced overall deposition rate

💡 Explanation

Increased substrate temperature provides more thermal energy. This enables hopping via increased adatom surface diffusion during thin film growth because atoms overcome energy barriers that form stronger covalent bonds; therefore, a smoother thin film results rather than a rough aggregate.

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