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Which outcome occurs when a pulsed laser anneals polysilicon?

A)Grain size increases via Ostwald ripening
B)Amorphous regions become more disordered
C)Dopant segregation decreases due to electromigration
D)Vacancy concentration gradient reverses direction

💡 Explanation

During laser annealing, larger grains grow by the mechanism of Ostwald ripening because smaller, high-energy grains dissolve, therefore the average grain size increases, rather than reducing the overall crystallinity or reversing vacancy gradients.

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