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Which phenomenon impairs image resolution when using microlithography?

A)Diffraction causes destructive interference
B)Refraction creates spherical aberration
C)Reflection induces blooming artifacts
D)Dispersion generates temporal spreading

💡 Explanation

Destructive interference reduces pattern sharpness because diffraction causes light waves to spread and overlap, therefore washing out fine features, rather than the others, which have less effect at these wavelengths.

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