Which consequence results when a plasma etcher's chamber walls catalyse radical recombination?

💡 Explanation

Reduced effective etch rate happens because surface recombination depletes etchant radicals; this decreases the radical concentration at the substrate surface, therefore the etch rate diminishes, rather than causing profile changes.

• Which property change occurs when an atom's valence orbital hybridization shifts from sp3 to sp2?
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• Which mechanism causes broadening of spectral lines in gas discharge lamps operating at high pressure?
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